... torsion interferometer 测扭干涉仪 interferometer measurement 干涉仪测定 airborne interferometer 机载干涉仪 ...
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... 干涉仪外壳 interferometer enclosure 干涉仪压力计 interferometer manometer 干涉仪量测 interferometer measurement ...
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A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
Because the measurement standard of grating system is grating pitch, compared to usual interferometer, diffractive grating, system reduces environment influence on measurement accuracy.
由于光栅干涉测量系统以光栅栅距作为测量基准，相对于传统干涉仪，光栅尺系统受环境因素造成的测量误差影响较小。
This paper introduces the laser interferometer for measurement of displacement and vibration for industrial robot.
本文介绍的是用于工业机器人检验的激光干涉测量法。
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