... multilayer interconnection 多层互连 ; interconnection metal 互连用金属 electrical interconnection 电互相联接 ; 电的互相联结 ; 电的互相联接 ...
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metal silicide interconnection 金属硅化物互连 ; 金属
metal interconnection pattern [材] 金属互连图案
metal film interconnection [电子] 金属膜互连
Electromigration in metal thin film interconnection is one of the important problems for VLSI reliability.
金属薄膜互连的电迁移现象是VLSI最重要的可靠性问题之一。
Metallization is the process of depositing a thin film of metal and patterning it to form the desired interconnection arrangement.
金属化是淀积一层薄薄的金属膜的工艺，将其制成模版用于形成所需的内部互连排列。
Method for reducing metal, multilayer interconnection structure and manufacturing method for the same, and semiconductor device and manufacturing method for the same.
金属还原方法，多层互连结构及制法，半导体器件及制法。
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