... 感应耦合电路 inductively-coupled circuit 感应系数 inductively; specific inductive capacity 电感计 inductometer ...
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inductively coupled circuit 感应耦合电路
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The RF self-bias of the substrate in an RF inductively coupled plasma is controlled by changing the impedance of an external circuit inserted between the substrate and the ground.
采用调节射频电感性耦合等离子体中基片电极与地之间的外部电路阻抗的方法，控制基片电极的射频自偏压。
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