Lithium ion batteries are attracting more attentions for their superior properties like high voltage, high energy density, high-speed discharge, low self-discharge, low toxicity, etc.

锂离子电池具有比能量高、体积小、质量轻、可高速率放电、自放电率低、循环寿命长、无毒等优异性能而倍受世人青睐。

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Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.

垂直扫描机构是单晶片离子注入机靶盘的支撑部件，起着将高速直线运动从靶室外传递到靶盘的作用。

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