目 前高数值孔径 ( high NA )与短波长(达DUV范围)的步进机,已经可以将线宽推进至100奈米以下尺寸;但伴随而来的问题,则是挑战在100nm线宽下的对准极限(3σ...
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optical system with high na 大数值孔径光学系统
high NA focus 高数值孔径聚焦
na high activity catalyst na高效催化剂
high temperature na corrosion loop 高温钠腐蚀回路
There is large area of high Na salty soil at Songnen Plain in the west of Heilongjiang.
黑龙江省西部松嫩平原为大面积高钠盐渍土区,区域内的土质大都为分散性粘土。
This paper introduced a method to testing small light spot produced by an optical system with high NA.
介绍了一种小孔扫描测量大数值孔径光学系统小光斑的方法。
The geochemical study on meso basic meta volcanics in Zhangchun group, northeast Jiangxi shows island arc tholeiite is characteristic of low K and high Na contents;
赣东北张村岩群所含之中基性变火山岩的地球化学研究表明:其主元素具低钾高钠;
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