The working principle and structure of a surface ionization ion source with high current is described systematically.

本文系统地描述了强流表面电离离子源的工作原理和结构。

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Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source.

利用金属蒸汽真空弧（MEVVA）源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件。

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Optical thin film properties deposited using the adapted high ion current plasma source are likewise described.

最后描述了利用高离子电流密度等离子体镀膜的光学薄膜。

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