This article will focus on the practical problems faced by the areas of IC manufacturing equipment, research high-acceleration and high-precision linear motor for scan.
本文将围绕IC装备制造领域所面临的实际问题，开展用于扫描的高加速度高精度的宏动直线电机的研究工作。
High speed and high precision machinery should have not only high spindle speed and high feeding speed, but also high spindle and feeding system acceleration.
高速高精度机床不仅要有高的主轴转速和进给速度，而且还需要具有高的主轴和进给系统运动加速度。
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