...描法（FringeScanning Interferometry），移相干涉术（Phase．shiftInterferometry），外差干涉术（Heterodyne Interferometry）和锁相干涉术（Phase．10catedInterferometry）等方法通过多幅干涉幽处理， 进行波面复原。
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A kind of non-contact test method of optical surface with big curvature radius by using spatial carrier heterodyne interferometry on the plane interferometer is mainly studied in the dissertation.
本文主要研究了一种非接触检测大曲率半径光学零件表面面形的方法,提出了在平面干涉仪上运用空间载频外差干涉术进行面形检测。
参考来源 - 利用空间载频外差干涉术在平面干涉仪上实现大曲率光学零件的检测Making use of heterodyne interferometry and dual-differential phase discrimination technology, the Single-focus Attitude Measuring (SAM) system obtains a high measuring resolution, which reaches 0.089nm, and thus is capable of measuring minor displacement as well as minor velocity.
该系统采用外差干涉和相位细分技术,测量分辨率达到0.089nm,满足了高分辨率的测量要求,因而可用于微小位移、微小速度的测量。
参考来源 - 磁头飞行姿态测量系统的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
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