The transmission angle is controlled by grating frequency and the diffraction efficiency is controlled by groove depth of sub-micro gratings to get uniformity of transmission filed.
亚微米光栅型导光板通过光栅空频控制出射光方向、控制槽深调节衍射效率，达到导光板出射光强的均匀性。
The method is qualified for measurement of groove depth and duty cycle simultaneously for the rectangle-shaped or similar profile of holographic grating mask.
对于要求同时检测矩形或接近矩形槽形的全息光刻胶光栅掩模的槽深和占宽比，该方法完全适用。
The efficiency of phase grating is limited by groove depth, material, duty ratio and wavelength.
衍射效率受光栅材料、凹槽厚度、占空比和所使用波长的影响。
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