The main devices of the method include a grating interferometer, which controls the ruling engine motion, and a phase scanning mechanism.

该方法的主要装置包括一个用于控制刻划机运动的光栅干涉仪和一个相位扫描机构。

youdao

Ruling with grating ruling engine is still the most important means for the fabrication of master grating. Hence, it is valuable to track the state-of-the-art of the diffraction grating ruling engine.

采用高精度的衍射光栅刻划机刻划依然是制作高质量母光栅最重要的手段，因此，跟踪世界光栅刻划机的最新技术进展具有重要的现实意义。

youdao