... 栅电容 场效应晶体管的ngate capacitance 栅腐蚀 gate etching 栅覆盖层 gate overlap ...
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gate recess etching 栅挖槽
etching of double gate oxide 双栅氧刻蚀
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The vertical transistor, however, does not rely on lithography and etching to define its gate length.
ECONOMIST: Transistors: A tall story | The
Only when all the masking and etching is complete is the sacrificial gate layer dissolved away, allowing the gates (and the insulation layers between the gate and channel of each transistor) to be filled in.
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