... gas sensing electrode ==> 气敏电极 gas sensitive element ==> 气敏元件 gas sensor ==> 气敏元件 ...
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ethanol gas sensitive element 乙醇气敏元件
semiconductor gas sensitive element 半导体气敏元件
In a general way,the sensitive performance of gas sensor is closely relative to the working temperature. It is very easy for MEMS to integrate the gas sensitive element,the heater and temperature sensor together.
气体传感器的敏感性能一般与工作温度密切相关，MEMS技术很容易将气敏元件和加热元件、温度探测元件制作在一起，保证了气体传感器的优良性能。
参考来源 - 基于MEMS技术的氧气微传感器机理研究与设计·2,447,543篇论文数据，部分数据来源于NoteExpress
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