gas phase doping 气相掺杂
gas-doping 气相掺杂
gas doping technique 气体掺杂技术
doping gas 掺杂气体
doping-task gas 稀释掺杂气体
To deeply investigate doping technology and implement it, this dissertation will focus on the research of gas doping process.
为了深入的研究并应用该项技术,本文对汽相掺杂工艺进行了研究和探讨。
参考来源 - 硅单晶汽相掺杂技术的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Phosphine (PH3) is an important electronic specific gas which is mainly used in fields of N-type semiconductor doping, ion implement and chemical vapor deposition (CVD) etc.
磷化氢(PH3)是一种重要的电子特气，主要用于n型半导体的掺杂、离子注入和化学气相沉积(CVD)等。
Said doping gas control part includes a gas quality flowmeter (of argon and azote) used by a gas protect part, and a doping case part.
所述的掺杂气体控制部分包气体保护部分 使用的氩气、氮气的气体质量流量计及掺杂箱部分；
A colorless, spontaneously flammable poisonous gas, PH3, having a fishy odor and used as a doping agent for solid-state components.
磷化氢，三氢化磷一种无色的、易自燃的有毒气体，ph3，有象鱼的气味，可用作。
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