二、详细说明: 韩国FLOWELL特气柜(Gas Cabinet),气体流量控制箱(Gas Box by MFC),气瓶架(Rack)、阀门箱(VMB),阀门盘(VMP),主要应用于:半导体,太阳能电池,微电子等...
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semi-water gas cabinet 半水煤气柜
wet gas cabinet 湿式煤气柜
converter gas cabinet 转炉煤气柜
dry-type gas cabinet 干式气柜
dry-style gas cabinet 干式煤气柜
blast furnace gas cabinet 高炉煤气柜
gas cabinet acceptance standard 煤气柜验收标准
Gas cabinet is an important unit used to handle special gases for semiconductor pro - cess.
气瓶柜是处理半导体特殊气体的重要装置。
The problems were analyzed for the seal system of dry-type gas cabinet, the seal construction was reformed, and good seal result was obtained.
分析了干式气柜密封系统存在的问题,并进行了密封结构的改造,取得了良好的改进效。
The problems were analyzed for the seal system of dry-type gas cabinet, the seal construction was reformed, and good seal result was obtained.
分析了干式气柜密封系统存在的问题,并进行了密封结构的改造,取得了良好的改进效果。
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