... 复合光栅Multi-grating 夫琅和费近似Fraunhofer approximation 夫琅和费衍射公式Fraunhofer diffraction formula ...
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... 夫兰克-康登原理 Francon interfreence ocular 夫兰兹-凯耳什效应 Fraunhofer approximation 夫琅和费近似 Fraunhofer condition ...
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Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction, including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect.
分析了用夫朗荷费衍射测量微小尺寸的原理误差，包括夫朗荷费近似误差和极值特征点位置探测误差。
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