The relationship between the ion energy flux colliding on the material surface and the plasma density is investigated.
研究了射频鞘层中离子轰击材料表面的能量通量与等离子体浓度之间的关系。
Choice of representative sea areas to carry out material flux research.
选择代表性海域开展物质通量的研究。
Based on the radio frequency sheath model, the equations for ion velocity, density, and energy flux colliding on the material surface are derived.
在射频鞘层模型基础上,推出了离子轰击材料表面的速度、浓度及能量通量的表达式。
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