deflected flow 折冲水流
flow deflected
流偏转
以上为机器翻译结果，长、整句建议使用 人工翻译 。
The reactants are initially pumped vertically downward by the viscose drag force of the high speed rotating disk, and then are deflected to form a flow region that is parallel to the wafer carrier.
反应物在初始阶段因高速旋转盘的牵引力被竖直向下地泵入，然后偏斜形成一个与衬底片托盘平行的流动区域。
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