There is some fear that as the unwanted film develops, it might eventually slough off and be disperse throughput the system.
有人担心:当这些不利的膜形成后,它们最终可能会脱落并分散到整个系统中。
This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
使用设有冷却手段的溅射装置,可以提高成膜工序的产量。
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