信息记录材料 关键词：薄膜电感器；等效电路；涡流 [gap=577]Key words: film inductor; equivalent circuit mode; eddy current
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thin film inductor 薄膜电感 ; 薄膜电感器
thick film inductor 厚膜电感器
air-cored film inductor 空心薄膜电感的
film inductor- 薄膜电感器
Results indi- cates that magnetic films with relatively higher resistivity and optimized magnetic circuit have to be considered in film inductor design.
结果表明选用较高电阻率的磁性薄膜和优化磁路设计，是薄膜电感器设计中必须考虑的问题。
The enhancement of the magnetic ferrite thin-film on the inductance (L) and quality factor (Q) of the inductor is analyzed.
阐述了磁性铁氧体薄膜对电感的感值（L）和品质因数（Q）的增强作用。
Inductors without the magnetic thin-film are fabricated as the referential sample using the same processes, in which the structure parameters are consistent with the inductor with magnetic thin-film.
同时，采用相同工艺同批制作了无磁膜微电感作为对比样品，并取各项结构参数与磁膜电感相一致。
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