These large differences are caused by all the other parameters, such as filament temperature, filament substrate distance, gas speed in the reactor, etc., which can vary in wide ranges.
产生这些巨大差别的原因是诸如反应器中的丝极温度、丝极基体距离、气体速度等所有其它参数，这些参数的范围很宽。
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
另外，随着热丝与衬底间距的增大，沉积出的多晶硅薄膜样品的晶化率明显减小，薄膜的晶粒尺寸也相应减小。
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