In this paper, the aberration theory of electron image forming systems in the combined focusing and deflecting field has been researched using the technology of numerical simulation.
本文利用数值仿真技术对复合场中电子成像系统的像差理论做了研究。
The axial third order aberration coefficients of an inhomogeneous magnetic sector field are derived for the first time.
首次推导出了非均匀扇形磁场的轴向三阶象差系数。
This paper describes the aberration and distortion of e-beam deflection magnetic field in which the parameters keep close to in the normal solution.
以电子束偏转磁场的像差和畸变为目标,对参量进行非劣解中找出贴近理想的最优解。
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