• 特征尺寸 - 引用次数：9

  With the development of micro-manufacture technique and computer technology, the feature size of binary optical elements becomes smaller and smaller. If binary optical elements are designed by the scalar diffraction theory, it will lead very monstrous error.

  随着微细加工工艺和计算机技术的发展,二元光学元件的特征尺寸进一步减小,利用标量衍射理论对其进行设计时将会产生较大误差,必须采用矢量衍射理论进行优化设计。

  参考来源 - 二元光学元件矢量衍射设计与并行直写制作
• 特征尺寸 - 引用次数：5

  In recent years the scale of the integrate circuit become larger and larger, the feature size of wafer has become much smaller, to guarantee the quality in following process, the demand to surface precision of wafer is very serious.

  近年来集成电路的规模越来越大,其所用芯片的特征尺寸越来越小,为保证后续加工的质量,对表面精度的要求是非常严格的。

  参考来源 - 流体二维振动超光滑表面加工振动场分析与实验研究

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