We studied facet coating technique by magnetron sputtering deposition equipment and obtained the optimized experiment condition by testing data analysis.
围绕镀膜工艺,利用磁控溅射镀膜机,进行了反复实验,通过测试和理论分析,找到了最佳工艺条件,成功制作了腔面膜。
参考来源 - 高功率半导体激光器腔面镀膜研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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