The process was controllable and could be applied to strip the photoresist residual of diffractive optical element fabricated on the thick substrate.

该工艺具有良好的可控性，解决了在厚基片上制作大口径衍射光学元件时残余光刻胶的去除问题。

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CGH element is designed and fabricated based on the computer generated hologram and the binary optical technique, and is applied in wavefront transformation.

运用计算全息原理与二元光学技术设计制作了用于波面变换的计算全息cgh元件。

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The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.

本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。

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