The results show that the extraction time and collision loss are decreased by increasing extraction voltage, but the sputtering loss increases and collection ratio decreases.
模拟结果表明,增加引出电压可以缩短引出时间,降低碰撞损失,但是增加了溅射损失,使得收集率降低;
The extracted beam current depends on operating parameter of source, extraction voltage and cathode material.
引出束流大小与源的工作参数、引出结构和电压以及阴极材料有关。
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