The common fabrication technologies of binary optical elements were expatiated, including etching, thin-film deposition, direct writing, excimer laser projection and gray-scale masks.
综述了二元光学元件的常用制作工艺技术，包括台阶刻蚀法、薄膜沉积法、直接写入法、准分子激光加工法和灰阶掩模法。
Excimer laser has excellent ablative and etching performances to both organic and inorganic materials.
准分子激光对无机和有机材料都有着很好的消融和蚀刻性能。
应用推荐