The resolution of an etching process is a measure of the fidelity of pattern transfer.
刻蚀工艺的分辨率是图形转移保真度的量度。
The resolution of an etching process is a measure of the fidelity of pattern transfer .
刻蚀工艺的分辨率是图形转移保真度的量度。
Because the etched pattern will be effected by many factors, many technical difficulties such as getting the ideal etched pattern and monitoring the etching process have not been solved yet.
因影响半导体激光诱导液相腐蚀效果的因素很多，要得到理想的腐蚀图样以及监控腐蚀进程有着很大的技术难度，至今没有得到有效解决。
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