The invention adopts the technical scheme of the invention can ensure that the bottoms of the holes are sufficiently filled through repeated filling and etching cycles.
本发明的技术方案，通过多次反复的填充、刻蚀循环，确保孔的底部能够得到充分的填充。
In the structure, etching the periodic holes around the waveguide of the ring resonator waveguide does not increase the size of the CROW.
在此结构中，环形耦合谐振腔的波导周围被刻蚀周期性的空气孔。
The DGS is implemented by etching circular holes in the ground plane of the patch antenna.
通过在贴片天线地板上刻蚀圆孔实现DGS结构。
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