... 蚀刻曲线;etching curve 蚀刻气体;etching gases 光刻蚀;photoetching ...
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etching gases
腐蚀气体
以上为机器翻译结果，长、整句建议使用 人工翻译 。
Results indicate that etching rates of BST thin films present non-monotonic dependence on mixing ratio of etching gases.
结果表明，刻蚀速率与刻蚀气体的混合比率呈现非单调特性。
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Correct selection of source gases and their compositions is one of the critical factors for si trench etching.
源气体及组分的选择是硅槽刻蚀技术的关键因素。
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