etching depth gauge 腐蚀深度量规
error of etching depth 刻蚀深度误差
the etching depth of grating 光栅刻蚀深度
depth etching 深度刻蚀
Experimental curves of etching depth versus repeated rate and radiation time of laser pulse are given.
同时给出了刻蚀深度与脉冲速率及脉冲时间的实验曲线。
The coupling problem between sensitive element and sensing element in etching depth sensor is discussed.
对离子束蚀刻深度传感器敏感元件与传感元件间的耦合问题进行了探讨。
It shows that the measurement result of etching depth is quite influenced by the vibration of sensitive element.
表明敏感元件的振动对蚀刻深度的测量结果有较大影响。
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