A new method of laser assisted wet etching is proposed, which depends on the etching current characteristic and uniformity of etching image to select the suitable etchant.
提出了一种激光诱导液相腐蚀新方法——利用腐蚀电流特性和腐蚀图像均匀度相结合的方法，选择出适合的腐蚀溶液。
The edges of the grooves after etching are plane and smooth. The depth and width of the grooves can solve the interference problem induced by the injection current between the adjacent pixels.
腐蚀后的上隔离沟槽边缘平整，其深度和宽度可以解决注入电流在相邻像素之间产生的干扰问题。
A serial of technologies for oxide films growing, which is most fitful for the current etching and formation linkage line. The related mechanisms are also included.
研究了一系列与目前工业联动腐蚀、化成线具有良好兼容性的复合氧化膜生长技术，并对相关机制进行了详细研究。
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