etch stop layer 蚀刻终止层 ; 腐蚀结束层
etch-stop 自停止腐蚀
Contact Etch Stop Layer 接触孔刻蚀停止层
self-etch-stop 自停止
etch stop etching 自致停腐蚀
Isotropic Etch-Stop 各向同性停蚀技术
automatic etch-stop 腐蚀自停止
Anisotropic Etch-Stop 各向异性停蚀技术
self-etch-stop etching 自致停腐蚀
A first nitride etch stop layer is deposited over the substrate.
一第一氮化物蚀刻终止层沉积于该衬底上。
A second nitride etch stop layer is deposited over the first nitride etch stop layer.
一第二氮化物蚀刻终止层沉积于该第一氮化物蚀刻终止层上。
The existence of rigid etch stop layer helped to reduce the thermal stress and plastic strain.
刚性蚀刻停止层的存在，有助于减少互连线的热应力和塑性应变。
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