A first interlayer conductive joint hole is formed on and through an interlayer dielectric layer and a dielectric etch stop layer.
一第一层间导电接孔形成于且穿过一层间介电层以及一介电蚀刻停止层。
Maybe the chemically etched can form the taper but the hole dimension maybe too big if only etch from one side.
化学蚀刻的模板也可以成锥形，但是如果只从一面腐蚀，开孔尺寸可能太大。
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