电子器件投稿系统 关键词： 四甲基氢氧化铵；自停止腐蚀；Al钝化 [gap=636]Keywords: TMAH; Etch-stop; Aluminum Passivation
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etch stop layer 蚀刻终止层 ; 腐蚀结束层
etch stop 蚀刻终止 ; 位错中止腐蚀
Contact Etch Stop Layer 接触孔刻蚀停止层
self-etch-stop 自停止
etch stop etching 自致停腐蚀
Isotropic Etch-Stop 各向同性停蚀技术
automatic etch-stop 腐蚀自停止
Anisotropic Etch-Stop 各向异性停蚀技术
self-etch-stop etching 自致停腐蚀
The silicon membrane was fabricated using KOH anisotropic etching and Si-Si3N4/SiO2 ’etch-stop’ process.
支撑硅膜采用KOH各向异性腐蚀和Si-Si3N4/SiO2自停止腐蚀技术制备。
参考来源 - 硅铝结构热堆红外探测器·2,447,543篇论文数据，部分数据来源于NoteExpress
The etch-stop phenomenon as a result of galvanic cell formation is verified by the wafer-level chip and the separated electrodes experiments.
用分立电极实验和芯片级实验验证了原电池钝化引起的腐蚀自停止现象。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
The first plate electrode is formed on a second inner connection structure provided under the dielectric etch stop layer.
该第一平板电极形成于设于该介电蚀刻停止层下的一第二内连接结构之上。
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