reactive ion etch resistance 耐活性离子腐蚀性
Etch Resistance 抗蚀能力 ; 抗蚀刻性
It is characterized by advanced technology and compact structure as well as high purification efficiency and resistance to etch with less trouble and low energy consume.
该设备具有技术先进，结构紧凑，污染物去除率高，故障少，耐腐蚀，能耗低等特点。
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