设备时间能力加工效率[半导体]半导体晶圆制造中的设备效率和设备能力 关键词：设备效率；设备能力；半导体制造 [gap=691]Key words: equipment efficiency;equipment capacity;semiconductor manufacturing
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overall equipment efficiency 效率 ; 合效率 ; 设备总合效率 ; 设备综合效率
Operational Equipment Efficiency 设备综合绩效
Overall Equipment Efficiency OEE 设备综合效率
OEE Overall Equipment Efficiency 设备综合效率
total equipment efficiency 设备综合效率
Total Productive Maintenance is an equipment management strategy that improves equipment efficiency.
全面生产性维护是一种设备治理策略以提高设备效率。
In recent years, the research of the military equipment efficiency analysis has received significant attention.
近年来，军用设备效能分析的研究引起了广泛重视。
TPM-Total Productive Maintenance is a kind of management technology orienting to the increase of total equipment efficiency.
全员生产维护是以提高设备综合效率为目标的管理技术。
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