The thick SOI films were prepared by SIMOX technology and Si epitaxy process.

利用SIMOX技术和硅外延工艺制备了厚膜SOI材料。

youdao

The results indicate that the low temperature epitaxy process is an acceptable method for the preparation of device quality GaAs l...

结果表明，低温外延是制备较高质量外延层的一种可取方法。

youdao

The results indicate that the low temperature epitaxy process is an acceptable method for the preparation of device quality GaAs layers.

结果表明，低温外延是制备较高质量外延层的一种可取方法。

youdao

If this (topdown) manufacturing process is to be based on the most modern forms of deposition (including epitaxy), e-beam or ultra-deep UV lithography and precision etching, the mainstay of microelectronics and optoelectronics fabrication, then there are strict limits described below for which one-off fabrication is possible, but manufacture is not.

FORBES: Are There Physical Limits to Nanotechnology?