In order to quickly generate three-dimensional model of MEMS and to realize process step simulation, a voxel-based fast MEMS process simulation method is given.
为了快速生成MEMS模型和实现加工的过程模拟，给出一种基于体素的快速MEMS工艺模拟方法。
Based on the compressed voxel model, a new method for scanning body modeling of a fillet-end cutting tool is presented.
提出了一种基于压缩体素模型的环形刀空间扫描体构造新方法。
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