由于检测电流可高达1.2nA,配合以特殊的电压差异(voltage contrast)电子扫描方式可对所有的电性缺陷进行再检测,如Contact/Via填充后形成的未接触(floating)和空洞(voids)等缺陷(图2)。
基于1个网页-相关网页
It discusses various voltage contrast methods, and introduces a new method, that is called electron beam induced voltage contrast method.
本文讨论了各种电压衬度法,也叙述了一种新的电压衬度法,称它为电子束感生电压衬度法。
Compared to the LCD using two glass substrates, our new device exhibits a comparable contrast ratio (514:1), driving voltage, and response time because of good LC alignment.
良好的液晶取向性能使新器件的对比度(514:1)、驱动电压和响应时间都能够与双玻璃基板LCD相比拟。
Compared with the conventional technology of reflective display, it shows high reflectivity, high contrast and low drive voltage.
结果表明,与传统反射式显示单元相比,此结构具有高反射率、高对比度和低驱动电压等特性。
应用推荐