The accurate control of the work pieces temperature in vacuum annealing furnace is a typical nonlinear large time delay and cross coupling complicated problem.
而在真空退火的生产过程中，退火工件温度的精确控制是一个典型的非线性、大时滞、强耦合的复杂控制问题。
The effects of substrate temperature and post deposition vacuum annealing on structural, electrical and optical properties of ZMO: ga thin films were investigated.
采用各种分析手段研究了沉积温度和真空退火处理对薄膜结构、表面形貌及光电性能的影响。
应用推荐