Based on the ideal shape model, variable thickness method is used to improve the uniformity of stress distribution of reflector, and the best thickness variation is determined.
在理想状态形状模型的基础上,提出了通过改变膜厚度方式改进反射面应力均匀度的方法,确定了最佳的反射面厚度变化规律。
Based on it, some expressions of thickness uniformity were discussed, with the distribution of thickness uniformity calculated at different target-substrate distances.
采用计算机计算了基片处于不同靶-基距时,膜厚均匀性的分布。
Then Ni-Mn alloy electroformation tests are carried out for the model of a nozzle. The high thickness distribution uniformity and Mn content of the electroformed layers are obtained.
对某喷管模拟件进行了镍锰合金的电铸试验,得到了较均匀的电铸层厚度及锰含量分布。
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