This method can greatly decrease the boundary layer thickness on the floor, and maintain good characteristics and uniformity of the flow field.

这种方法使地板边界层厚度大大降低，而风洞仍保持好的流场品质及流场较均匀的特点。

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In this way information is provided into the spacer layer (22) without disturbing the thickness uniformity of the spacer layer (22).

这样就将信息提供到了间隔层(22)中，同时没有扰乱间隔层(22)厚度的均匀度。

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The influence of growth parameters including gas flow, C/Si ratio, growth temperature and pressure on growth rate and layer uniformity in thickness and doping are discussed.

比较了外延生长参数，如生长温度、生长压强、碳硅比和气流流速，与生长率和净载流子浓度的影响关系。

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