Thermal Evaporation Deposition 蒸镀法 To The Evaporation Deposition 对于蒸发镀膜 Physical Deposition: Evaporation and Sputtering 蒸发和溅射 ..
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The invention relates to physical or chemical vapor deposition, such as evaporation, of metal current collector on electrode with self-supporting type.
本发明涉及自支撑式电极上金属集电器的物理或化学汽相沉积，例如蒸发。
The method can be used not only for vacuum evaporation deposition, but also for sputtering deposition to prepare the thin-film.
它 既能用于真空蒸发沉积，又可用于溅射沉积来制备薄膜。
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