A polysilicon thin film pressure sensor is presented. It utilizes polysilicon thin film as stress sensitive material.
介绍一种以多晶硅薄膜为敏感材料的压力传感器。
Various performance compensation methods have been designed according to the characteristic of the thin film pressure sensor.
针对薄膜压力传感器的特性，设计各种性能补偿方法。
A new type of non-silicon thin film grid pressure sensor was brought forward and devised to detect and measure the pressure distribution between the bodies s touching surfaces of hemiplegics patient.
针对偏瘫病患者身体接触面间的压力分布检测，提出并研发了一种基于压阻效应的新型非硅薄膜网格压力传感器。
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