Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.
垂直扫描机构是单晶片离子注入机靶盘的支撑部件,起着将高速直线运动从靶室外传递到靶盘的作用。
The supporting part is fixedly connected with the joint in order to fold the convex-bubbled component and cover sheets for the cover plate behind the protection part.
支撑部与接头固定连接,以便折叠凸泡组件和保护部之后罩板覆盖薄片。
In addition, because the supporting part is connected with the joint of the protection part, the convex-bubbled package component has a continuous part with large area to print operation instructions.
还有,由于支撑部与保护部的接头相连,凸泡包装件有大面积连续部分来印刷使用说明。
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