The developing experiment device of RF discharge plasma processing and measurement is introduced.
介绍了自行研制的高频放电等离子体处理及测试实验装置。
The details about design of RF signal processing circuit and system software are given.
详细介绍了高频信号处理电路部分和系统软件的设计与开发；
An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radio frequency power from an RF power supply to the interior of the processing chamber.
感应耦合等离子体触角安装在介电窗上以便定位在介电窗的中心上，并且将来自射频电源的射频功率传输到加工室内部。
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