中国科技论文网 关键词 ：磁控溅射；靶材刻蚀；计算机模拟；状态分布 [gap=1355]Keywords: magnetron sputtering; target erosion; computer simulation; state distribution
基于8个网页-相关网页
Besides of those, the pattern of the target is novel after the long time's erosion. There is no erosion ring on its surface, so we can use this method to improve the utilization rate greatly.
此时靶面被刻蚀的状态比普通磁控溅射的要均匀得多，刻蚀深度值是从边缘到中间逐渐增大的，在靶面并没有出现通常的刻蚀环，因此这种磁控配置大大提高了靶的利用率。
This article took the black soil as a target to analyze its erosion types and characteristics.
文章以黑土为对象，分析了水土流失的方式和特点。
应用推荐