应用田口实验规划(Taguchi Quality Design)及变異數分析，观察不同溅镀參數包 括：射频功率、制程压力、镀膜时间、基板 温度、退火温度，对GZO 透明导电膜的影 响。
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Robust parameter design, proposed by Taguchi Doctor, is the cote theory foundation of quality engineering.
田口博士创立的稳健参数设计是质量工程学的理论核心。
Mainly the author of this essay elaborates that Taguchi parameter design controls the linewidth quality in semiconductor manufacturing.
本文着重论述了田口式参数设计法在半导体制造中对线宽的质量控制。
Based on AHP, a novel quality loss cost model was developed for product tolerance design, which overcome drawbacks of the conventional Taguchi method.
面向零部件公差设计优化问题，提出一种基于层次分析法的产品质量损失成本模型，该模型克服了常用的田口方法的一些缺点。
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