The analysis of surface effect is based on defect reaction and diffusion theory, the study for surface effect will have good guidance to the improvement of electrical properties.
利用缺陷反应和扩散原理对表面层效应进行了初步分析，指出表面层效应的研究对改善和调节材料的电学性能具有重要的指导意义。
The top surface has much effect on dissolution process and the bottom surface make a notable contribution to diffusion process.
上表面对膜的溶解过程影响较大，下表面对膜的扩散控制有较大贡献。
In process parameters, the rf power and pressure affect the number, energy and composition of the basic elements, the substrate temperature effect the surface diffusion and atomic bonding.
工艺参数中，射频功率和压强综合影响了基元数量、能量以及成分，基片温度主要影响表面扩散、原子成键。
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