Local interpolation model is used to replace Zernick polynomials for surface contour error fitting at the grinding stage.
提出了线性插值法代替惯用的泽尼克多项式拟合用于表面的精磨。
An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提高非球曲面超精密加工机床的轮廓跟踪精度的误差补偿控制方法。
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